School of Instrument Science and Engineering, Southeast University, Nanjing, China
Email: 113540234@qq.com
Manuscript received November 25, 2023; revised December 15, 2023; accepted December 29, 2023
Abstract—This paper provides an overview of the current development status of acceleration sensors from three aspects: development methods, working principles, and sigma-delta (ΣΔ) modulation technology. The performance characteristics of the most representative EM-ΣΔM inertial sensor system are introduced. The optimized methodology for improving the performance and accuracy of capacitive Micro-Electro-Mechanical Systems (MEMS) accelerometers while reducing mechanical and electronic noise is given. Finally, by comparing with advanced foreign technologies, the challenges and development directions faced by domestic MEMS accelerometer research have been identified.
Keywords—Micro-Electro-Mechanical Systems (MEMS), micro-capacitive accelerometer, EM-ΣΔM, force feedback, optimized methodology
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Cite: Chen Lingjia, "Overview of Micro-Mechanical Accelerometer Research Based on ΣΔ Modulation Technology," International Journal of Engineering and Technology vol. 16, no. 1, pp. 6-10, 2024.
