• May 03, 2016 News! Vol.7, No.5 has been indexed by EI(Inspec)!   [Click]
  • May 03, 2016 News! Vol.7, No.4 has been indexed by EI(Inspec)!   [Click]
  • Feb 08, 2017 News!Welcome Dr. Lei Chen from China to join the Editorial board of IJET.   [Click]
General Information
Editor-in-chief
Prof. T. Hikmet Karakoc
Anadolu University, Faculty of Aeronautics and Astronautics, Turkey

IJET 2013 Vol.5(2): 202-205 ISSN: 1793-8236
DOI: 10.7763/IJET.2013.V5.542

Modelling of Piezoelectric Actuator (PEA) for Advanced Process Control in Chemical Mechanical Polishing (CMP)

Jing-Hang Liu, William J. O’Connor, Eamonn Ahearne, and Gerald Byrne
Abstract—Lead zirconate titanate (PZT) stacks are commonly used for submicron resolution actuation, fast response times and high sensitivity. They are usually modeled as expansion generators without external load. This paper proposes an electromechanical model for a commercially available micro-piezoelectric actuator (PEA) which comprises pre-stressed PZT stacks and external amplifier flexure frame for closed loop force control. The proposed model avoids the need to measure the piezoelectric charge which is usually required in conventional electromechanical models. The mechanical part of the PEA was modeled as a linear, lumped, double mass-spring-damper system and the related parameters were experimentally identified. The PEA system was characterised under load-free and load-applied conditions, and the electromechanical coupling ratios which describe the energy transfer from the electrical domain (voltage) to the mechanical domain (endpoint displacement/force) were experimentally determined.

Index Terms—Electromechanical modeling, micro-piezoelectric actuator, parameter identification, force control.

J. Liu, E. Ahearne, and G. Byrne are with the Advanced Manufacturing Science (AMS) Research Centre, School of Mechanical and Materials Engineering, University College Dublin, Ireland (e-mail: jinghang.liu@ucd.ie, eamonn.ahearne@ucd.ie, gerald.byrne@ucd.ie).
W. J. O'Connor is with the School of Mechanical and Materials Engineering, University College Dublin, Ireland (e-mail: william.oconnor@ucd.ie).

[PDF]

Cite: Jing-Hang Liu, William J. O’Connor, Eamonn Ahearne, and Gerald Byrne, "Modelling of Piezoelectric Actuator (PEA) for Advanced Process Control in Chemical Mechanical Polishing (CMP)," International Journal of Engineering and Technology vol. 5, no. 2, pp. 202-205, 2013.

Copyright © 2008-2015. International Journal of Engineering and Technology. All rights reserved. 
E-mail: ijet@vip.163.com