—Traditionally, the semiconductor fabrication conducts several measurements within a wafer and condenses the measurements into output quality characteristics to progress advanced process control (APC). Therefore, traditional APC employs performance indices along “time” axis and losses the space information among different measurements within a wafer. In this paper, we present a new perspective on process control with pheromones propagation mechanism, in which we treats the disturbances within a two-dimensional layout wafer as digital pheromones,. Our novel space-effect algorithm is called the two-dimensional pheromone propagation controller (2D-PPC). The simulation results show 2D-PPC, which involves space-effect, can improve the uniformity of the wafer over the conventional time-effect controllers.
—Two-dimensional pheromone propagation controller, process control, two-dimensional pheromone basket, two-dimensional digital pheromone infrastructure, swarm intelligence
D. S. Lee was with the Dept. of Mechanical Engineering, National Chiao Tung University, Taiwan (e-mail: dslee605@ ms37.hinet.net).
A. C. Lee is with the Dept. of Mechanical Engineering, National Chiao Tung University, Taiwan (e-mail: aclee@ mail.nctu.edu.tw).
Cite: Der-Shui Lee and An-Chen Lee, "Two-Dimensional Pheromone Propagation Controller," International Journal of Engineering and Technology vol. 5, no. 2, pp. 218-222, 2013.